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Piezo-MEMS


Services: Piezo –memes is processed as shown
Assistance:
Hyemin can provide the design help and 3D Simulator

Example Design

Area: 10×10mm2

Wafer: 150mm

No. of devices: 92ea/wf

Facilities for the Piezo MEMS devices.
Materials

Single Crystal Block

15.5 x 15.5 x 0.08 mm

Single Crystal Film

15.5 x 15.5 x 0.2 mm

dss Mode PMN-PT Crystal Film

With Gold plates